JPS6157519U - - Google Patents
Info
- Publication number
- JPS6157519U JPS6157519U JP14175784U JP14175784U JPS6157519U JP S6157519 U JPS6157519 U JP S6157519U JP 14175784 U JP14175784 U JP 14175784U JP 14175784 U JP14175784 U JP 14175784U JP S6157519 U JPS6157519 U JP S6157519U
- Authority
- JP
- Japan
- Prior art keywords
- exposure apparatus
- photomasks
- superimposed
- semiconductor wafer
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14175784U JPS6157519U (en]) | 1984-09-19 | 1984-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14175784U JPS6157519U (en]) | 1984-09-19 | 1984-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6157519U true JPS6157519U (en]) | 1986-04-17 |
Family
ID=30700096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14175784U Pending JPS6157519U (en]) | 1984-09-19 | 1984-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6157519U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006126460A (ja) * | 2004-10-28 | 2006-05-18 | Shinko Electric Ind Co Ltd | 露光装置および露光方法 |
-
1984
- 1984-09-19 JP JP14175784U patent/JPS6157519U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006126460A (ja) * | 2004-10-28 | 2006-05-18 | Shinko Electric Ind Co Ltd | 露光装置および露光方法 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6157519U (en]) | ||
| JPS63188938U (en]) | ||
| JPS6382933U (en]) | ||
| JPH03117829U (en]) | ||
| JPH01173770U (en]) | ||
| JPS63118229U (en]) | ||
| JPS63115213U (en]) | ||
| JPS61188152U (en]) | ||
| JPS61140354U (en]) | ||
| JPH0226777B2 (en]) | ||
| JPS6127548A (ja) | 非接触式露光装置 | |
| JPS63258019A (ja) | 目合露光装置 | |
| JPS6181657U (en]) | ||
| KR960007293Y1 (ko) | 스텝퍼 | |
| JPH05232685A (ja) | 微細矩形用図形の転写方法 | |
| JPH0420226U (en]) | ||
| JPS645433U (en]) | ||
| JPH0373428U (en]) | ||
| JPS606148U (ja) | 投影露光装置 | |
| JPH02102719U (en]) | ||
| JPH01302722A (ja) | 投影露光装置 | |
| JPH0325227U (en]) | ||
| JPS60166144U (ja) | 投影露光装置 | |
| JPS58118746U (ja) | ウエハチヤツク | |
| JPH0260227U (en]) |